Brevetto

US 20110044838A1

United States

Patent Application Publication oo) Pub. No.: US 2011/0044838 Al

Oda et al. (43) Pub. Date: Feb. 24,2011 1

 IRON SILICIDE SPUTTERING TARGET AND METHOD FOR PRODUCTION THEREOF

 Inventors: Kunihiro Oda, Ibaraki (JP); Ryo Suzuki, Ibaraki (JP)